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Corrosive & Specialty Gas Ambient Temperature Purification




Impurities removed include H2O, O2, CO, CO2, H2, and NMHC. Impurities in these gases are reduced to less than 1 part-per-billion, in most cases.

To select a Purifier:
Please choose a model size, media, and optional equipment
Example part number MC1-302FV

MC1

-202

FV

Model Size

Media

Options

Model Size

Model

Nominal Flow(1)

Max Flow(1)

Max PSIG

Specifications

MC1

0.5 slpm

5 slpm

1000 psig

Datasheet (408.29 KB)

MC50

1.5 slpm

10 slpm

1000 psig

Datasheet (415.58 KB)

MC190

5 slpm

50 slpm

250 psig

Datasheet (468.85 KB)

MC200

5 slpm

50 slpm

250 psig

Datasheet (462.17 KB)

MC400

9 slpm

60 slpm

250 psig

Datasheet (483.55 KB)

MC450

10 slpm

75 slpm

250 psig

Datasheet (480.73 KB)

MC500

12 slpm

100 slpm

250 psig

Datasheet (458.91 KB)

MC1500

40 slpm

250 slpm

250 psig

Datasheet (580.19 KB)

MC3000

80 slpm

500 slpm

250 psig

Datasheet (448.10 KB)

MC4500

200 slpm

 1000 slpm

250 psig

Datasheet (434.05 KB)

MC9000

300 slpm

1000 slpm

250 psig

Datasheet (416.90 KB)

 

 

 

 

 

HP190

5 slpm

50 slpm

1000 psig

Datasheet (468.85 KB)

HP400

9 slpm

60 slpm

1000 psig

Datasheet (483.55 KB)

 

 

 

 

 

SP70

1.5 slpm

20 slpm(2)

3000 psig

Datasheet (494.44 KB)

SP300

10 slpm

100 slpm(2)

3000 psig

Datasheet (494.44 KB)

SP600

15 slpm

200 slpm(2)

3000 psig

Datasheet (494.44 KB)

 

 

 

 

 

PG1

10 slpm

15 slpm

250 psig

Datasheet (543.42 KB)

MSDS Sheets - Please consult the factory


Media Types for Corrosive and Specialty Gases
 

Media

Gases Purified

Impurities Removed

Outlet Performance

 Regenerable

302(4)

B2H6, BCI3, BF3, CClH3, Cl2, CO2, DCS, GeCl4, GeH4, H2S, H2Se, HBr, HCl, N2O, NF3,NO, SiCl4, SiF4, SiH2CI2, SiHCl3, SO2

H2O

< 1 ppb

NO

905

C2F6, C2H6, C3F8, C3H8, C2F4H2, C4F8, C4H10, CC14, CF4, CH4, CHF3, SF6

H2O, O2, CO, CO2, H2 NMHC

< 1 ppb

 YES


Options

Option

Description

Comments

F

0.003 Ám filter option

2 Ám filter standard

HF

0.003 Ám high-flow filter option

For use with MC4500 model only

V

Inlet and outlet valves

1/4" Manual diaphragm. (Not available on SP models.)


Notes:
1. Flowrates stated without optional filters or valves
2. Max flowrate increases between 2,000 - 3.000 psig (see specification)
3. Not available with all models. Please contact SAES Pure Gas for details.