Point of use Purifiers:Rare Gases and Nitrogen
Clean Dry Air (CDA) and Oxygen
Dryer (H2O Removal)
Weld and Purge Gases
Corrosive and Specialty Gases
Ammonia and DMHz
Carbon Dioxide, Acetylene
Bulk Gas Purification:CDA (Clean Dry Air) [PS22]
Nitrogen with CH4 Removal [PS9]
Rare Gas [PS5]
Hydrogen with N2 and CH4 Removal, 5N [PS7-H]
Hydrogen with N2 and CH4 Removal, 6N [PS7-G]
Factory Regenerable [PS14]
Palladium Hydrogen Purifiers:Palladium Hydrogen Purifiers - PS7-PD05
Palladium Hydrogen Purifiers - PS7-PD1
Palladium Hydrogen Purifiers - PS7-PD2
PS5 RARE GAS PURIFIER
The PS5 MegaTorr Rare Gas purifiers are heated getter-based purifiers designed specifically to provide ultra-high purity (UHP) gas for semiconductor applications.
The patented getter alloy operates at elevated temperatures to remove impurities by forming irreversible chemical bonds. Impurities removed will not be released under any circumstances when the purifier is operated within specification. Outlet impurity levels for O2,H2O, CO, CO2, H2, CH4, and N2 are reduced to parts per billion concentrations.
Downstream of the heated getter columns, Hydrogen impurities are removed by a patented secondary ambient temperature getter cartridge, known as the Hydrogen Removal Unit (HRU).
Fully automatic operation is provided standard with the microprocessor-based controller and full instrumentation. Multi-tiered fault protection keeps gas flowing while alerting the operator of any problems. Long getter life is achieved through efficient getter bed designs, which safely optimize operating temperature, bed dimensions and flow rates. For the PS5 platform only electrical power and pneumatic air supply is needed to operate the purifier.
The PS5 can be installed into small areas because of the compact design and front/rear access (zero-side clearance acceptable). The PS5 comes standard with GettSafe™ – the state-of-the-art solution to fast-response thermal protection. GettSafe quickly detects excessive heat in the getter column, and the built-in discrete hardware interlock takes action to isolate the purifier.