Point of use Purifiers:

Rare Gases and Nitrogen
Hydrogen
Clean Dry Air (CDA) and Oxygen
Dryer (H2O Removal)
Weld and Purge Gases
Corrosive and Specialty Gases
Ammonia and DMHz
Carbon Dioxide, Acetylene

Bulk Gas Purification:

CDA (Clean Dry Air) [PS22]
Nitrogen [PS8]
Nitrogen with CH4 Removal [PS9]
Rare Gas [PS5]
Hydrogen [PS7-A]
Hydrogen with N2 and CH4 Removal, 5N [PS7-H]
Hydrogen with N2 and CH4 Removal, 6N [PS7-G]
Oxygen [PS6]
Ammonia [PS21]
Factory Regenerable [PS14]

Palladium Hydrogen Purifiers:

Palladium Hydrogen Purifiers - PS7-PD05
Palladium Hydrogen Purifiers - PS7-PD1
Palladium Hydrogen Purifiers - PS7-PD2

SAES Pure Gas Palladium Hydrogen Purifiers produce the purest hydrogen on the planet. The patented Micro-Channel design offer the most significant innovation in hydrogen gas purification in over 20 years. The advanced Hydrogen purifier offers higher flow capacity with lower cost and improved durability for high-volume manufacturing processes. SAES Pure Gas Hydrogen purifiers deliver 9N's (99.9999999%) purity with typical levels.

The PS7-PD1 includes one Palladium cell in a compact enclosure for a wide range of flows for point-of-use purification for single process tools or bulk gas supply for many process tools at large LED and semiconductor fabs. A single Palladium cell purifiers the entire inlet Hydrogen flow. The enclosure is suited for installation near the process tools or in a bulk gas room.

Palladium Membrane Diffusion - How it Works

Purification of hydrogen by palladium (Pd) membrane diffusion is the accepted technology for applications requiring part-per-billion gas purity. Palladium acts as a catalyst, causing hydrogen gas molecules to dissociate into atoms upon contacting the membrane surface. The atoms are small enough to diffuse through the palladium membrane, driven by differential hydrogen pressure across the membrane. The hydrogen atoms recombine into molecules after passing through the membrane. Hydrogen purifiers operate at approximately 400°C. At this temperature, only hydrogen atoms readily diffuse through the membranes. No other impurities can diffuse through the palladium membrane.

Impurities including H₂O, O₂, CO, CO₂, N₂, He, Ar, and THC (Total Hydrocarbons including CH4) impurities remain on the inlet side of the membrane and are continuously purged through a bleed connection. The unique properties of palladium provide a solid barrier with no breakthrough as compared to catalysts and getters that rely on chemical reactions on reactive surface areas. A nitrogen purge system is included to purge the purifier at startup and during any shutdown.

Key Features

• Ultra-pure hydrogen from any source
• < 99.9999999% purity; < 1 ppb total impurities
• Patented palladium micro-channel technology
• High flow capacity up to 1,085 slpm (70 Nm³/hr.)
• Lowest power consumption
• Smallest footprint
• Nitrogen purge system
• 5.0" Color touchscreen HMI with PLC

Palladium Advantages

• Only hydrogen passes through to the pure side - the purest gas
• Every impurity is removed - no exceptions
• Unlimited lifetime - non-consumable technology
• Separates pure H₂ from source gas with ppm or % level impurities
• Easy to verify performance with in-situ helium leak test

Applications

• GaN epitaxy
• Silicon carbide (SiC) epitaxy
• III/V and II/VI MOCVD
• Photovoltaics
• Polysilicon production
• Semiconductor
• Fiber optic processes
• Fuel cells

MegaTorr PS7-PD1 Palladium Purifier

Single Pd Cell

Model Number	Typical Flow Rate 260 psig inlet pressure 80 psig outlet pressure
	slpm	Nm3/hr
PS7-PD1-05	48	2.9
PS7-PD1-10	96	5.8
PS7-PD1-15	145	8.7
PS7-PD1-20	193	11.6
PS7-PD1-25	241	14.5
PS7-PD1-30	290	17.4
PS7-PD1-35	338	20.3
PS7-PD1-40	386	23.2
PS7-PD1-45	435	26.1
PS7-PD1-50	483	29.0
PS7-PD1-55	531	31.9
PS7-PD1-60	580	34.8
PS7-PD1-65	628	37.7
PS7-PD1-70	676	40.6
Other models available

For more information, click here to view the Brochure pdf.