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S22 CDA (Clean Dry Air) GAS PURIFIER




The PS22 Series Gas Purifiers are enhanced, optimized designs providing sub-ppb performance. SAES Pure Gas has drawn on years of experience in Ultra-High Purity (UHP) piping design, advanced process material analysis and state of the art integrated control systems to develop this family of purifiers to meet the needs of low capital cost, high reliability and high performance.

The PS22 series uses ambient temperature adsorption processes designed specifically to provide UHP gas for semiconductor applications. Outlet impurity levels for CO2, H2O and trace impurities including TOCís (C7+), amines, ammonia, siloxanes, sulfurs, refractory compounds, phthalates, carboxylic acids and NOx, are reduced to below parts per billion (ppb) levels.

The risk of impurity breakthrough is minimized when using a regenerable, "self-cleaning" purifier, like the PS22, as opposed to a disposable, "fixed capacity" canister. Experience has shown that inlet impurities found in CDA, for example, can vary greatly depending on ambient atmospheric conditions.

FEATURES


STANDARD FEATURES
  • Auto regenerable
  • HMI touch screen display
  • Fully automated microprocessor controller
  • Flow rates available: 5 Nm3/hr - 10.000 Nm3/hr


GASES PURIFIED
  • CDA
  • Nitrogen
  • Oxygen
  • Inerts and O2/inert mixtures


PERFORMANCE
  • Removes H2O, CO2, TOCs, Acids, Bases, and trace impurities
  • < 10 ppt performance


PERFORMANCE
  • High Temperature Hardware Interlock for over-temperature protection independent of the control system.
  • Auto or Manual Bypass allows process gas flow to bypass the purifier vessels.
  • Particle Filter provides purified gas filtration using a TFE or metal element.
  • MODBUS Data Communication Port provides operational data output.
  • Ground Fault Protection (GFI) provides protection from electrical ground fault.
  • Emergency Off (EMO) Button provides control for an emergency stop.
  • Purifier Hold Down Brackets provide means for securing purifier to floor or wall.
  • Separate Control Power allows purifier control power by customer UPS separate from main purifier power.


PS22 Performance
Gas Purified Impurities Removed Outlet Performance
CDA H2O, CO2 < 100 ppt
TOC, Acids, Bases, Refractory Compounds < 10 ppt
Note: Purifiers are gas specific and should only be used for the gas indicated


PS22 Specifications
 Model Maximum Flow (Nm3/hr) Average Power Consumption (kW) Maximum Pressure Drop (bar) Dimensions (cm) Weight (kg)
H W D
PS22-MGT5-CDA 5 0.2 0.7 86 53 30 48
PS22-MGT10-CDA 10 0.2 0.7 86 53 30 48
PS22-MGT20-CDA 20 0.3 1 135 84 41 100
PS22-MGT25-CDA 25 0.3 1 135 84 41 100
PS22-MGT30-CDA 30 0.4 1 135 84 41 110
PS22-MGT40-CDA 40 0.4 1 135 84 41 110
PS22-MGT60-CDA 60 0.5 1 150 84 41 120
PS22-MGT100-CDA 100 0.5 1 196 132 135 1500
PS22-MGT150-CDA 150 0.5 0.7 193 132 135 1500
PS22-MGT200-CDA 200 0.5 0.7 193 132 135 1500
PS22-MGT300-CDA 300 0.5 0.7 193 132 135 1500
PS22-MGT600-CDA 600 1 1 209 148 196 3000
PS22-MGT1000-CDA 1000 0.7 0.7 239 191 236 2300
PS22-MGT1200-CDA 1200 1 0.7 239 191 236 2300
PS22-MGT1500-CDA 1500 1.5 0.7 239 191 236 2500
PS22-MGT1800-CDA 1800 1.5 0.7 239 191 236 2500
PS22-MGT2000-CDA 2000 1.5 1 264 252 262 5000
PS22-MGT3000-CDA 3000 2 1 264 252 262 5600
PS22-MGT3500-CDA 3500 2 1 264 252 262 5600
PS22-MGT4000-CDA 4000 2 1 264 252 262 5600
PS22-MGT5000-CDA 5000 2 1 264 252 262 5600
PS22-MGT6000-CDA 6000 3 1 267 252 467 10500
PS22-MGT8000-CDA 8000 3 1 267 252 467 12000
PS22-MGT9000-CDA 9000 4 1 267 252 467 12000
PS22-MGT10000-CDA 10000 4 1 267 252 467 12000


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