Hydrogen Palladium Membrane:

HP Series Systems, Model HP2-HP150
V-Purge System, HP200-HP 480
HP Series Repl. Palladium Cells, HP2-HP480

Heated Getter and Catalytic:

Heated Getter Purifiers, Wall Mount I&II
Heated Getter Purifiers, Wall Mount III
Catalytic Purifiers
Oxygen Purifiers

Bulk Purification:

GPT Series Bulk Palladium Purifiers
Heated Getter Bulk Purifier
Regenerable Catalytic Purifier
Getter Weld Argon Purification Systems

Special Applications:

Tritum Purifiers
Oxygen Removing Purifiers

PureGuard wall mount heated getter gas purifiers provide total removal of all impurities and parts-per-trillion (ppt) purity for nitrogen, argon, helium and other rare gases. The compact packaging provides continuous purification and comes in sizes for most flow rates.

Total Impurity Removal
PureGuard wall mount heated getter purifiers are continuously heated during operation to provide complete removal of all impurities. Getter purifiers offer the only method to remove N2 and CH4 from argon and rare gases. Getter is also the most efficient method for removal of O2, H20, CO, CO2 and H2.

Longer Lifetime
Getter purifiers use non-evaporable zirconium-based getter media that irreversibly removes impurities. Heating of the getter material allows for bulk diffusion of the impurities into the metal getter. This process allows for the use of the entire getter media to provide large capacity, unlike ambient catalyst-type purifiers which use only the surface area as active removal sites. PureGuard getter purifiers last up to 40 times longer than comparable size ambient catalyst purifiers.

Suggested Applications

• PVD, Sputtering Ar, N2
• SiC growth Ar
• Si growth Ar
• Purge for MOCVD N2
• Zero gas for analytical instruments Ar, N2
• Low temp SiGe, epi N2

For more information, click here to view the datasheet pdf.