Hydrogen Palladium Membrane:

HP Series Systems, Model HP2-HP150
V-Purge System, HP200-HP 480
HP Series Repl. Palladium Cells, HP2-HP480

Heated Getter and Catalytic:

Heated Getter Purifiers, Wall Mount I&II
Heated Getter Purifiers, Wall Mount III
Catalytic Purifiers
Oxygen Purifiers

Bulk Purification:

GPT Series Bulk Palladium Purifiers
Heated Getter Bulk Purifier
Regenerable Catalytic Purifier
Getter Weld Argon Purification Systems

Special Applications:

Tritum Purifiers
Oxygen Removing Purifiers

PureGuard heated getter gas purifiers provide total removal of all impurities, down to the parts-per-trillion (ppt) level for nitrogen, argon, helium and other rare gases. The compact packaging provides continuous purification, automated control, menu-driven software and real-time display of remaining purifier lifetime.

Total Impurity Removal
PureGuard heated getter purifiers are continuously heated during operation to provide complete removal of all impurities. Getter purifiers offer the only method to remove N2 and CH4 from argon and other rare gases. Getter is also the most efficient method for removal of O2, H2O, CO, CO2 and H2.

Long Lifetime
Getter purifiers use non-evaporable zirconium-based getter media that irreversibly remove impurities. Heating of the getter material allows for bulk diffusion of the impurities into the metal getter. This process allows for the use of the entire getter media to provide large capacity, unlike ambient catalyst-type purifiers which use only the surface area as active removal sites. PureGuard getter purifiers last up to 40 times longer than comparable size ambient catalyst purifiers.

Real-time End-of-Life Monitoring System
The purifier includes a continuous display of remaining purifier lifetime. The system monitors total gas flow and incoming purity and provides an easy-to-read display of current status. The PLC controlled system can adapt to various inlet gas quality to provide accurate notification of the time for getter column replacement. Other purifier detection methods are not accurate due to problems with channeling, uneven breakthrough and detection limits. The End of Life Indicator from Johnson Matthey gives you confidence that monitoring is continuous and accurate.

Exotherm Protection
The PureGuard heated getter purifier is on guard for high levels of impurities that might cause overheating of the reactive getter media. If high levels of air or other impurities flow into the purifier, the system will immediately detect this condition. The purifier actuates to bypass mode and alarms are activated.

Suggested Applications

• PVD, Sputtering Ar, N2
• SiC growth Ar
• Si growth Ar
• Purge for MOCVD N2
• Zero gas for analytical instruments Ar, N2
• Low temp SiGe, epi N2

For more information, click here to view the datasheet pdf.